High-resolution diffraction

Superior High-Resolution X-ray Diffractometers for Thin Films and Single-Crystal Materials

AXRD® LPD-HR

The Highest Quality Data for Your Research or Production Lab

The AXRD LPD-HR is our popular LPD system with upgraded optics to enable the characterization of thin films and single-crystal materials.

Characterize the physical surface properties of your thin films, multilayer coatings, and interfaces with XRR. Analyze epitaxial layers and determine the crystalline perfection of bulk single crystals with high-resolution rocking curves. Gain valuable information about epitaxial layers and efficiently analyze strained films with reciprocal space mapping.

Carrying over the LPD’s innovative goniometer design along with the latest advancements in motor and encoder technology, this system provides the utmost accuracy for your experiments.

Eulerian cradle in AXRD LPD-HR

Wafer handling in the AXRD LPD-HR

$AXRD High-resolution diffractometer$

X-RAY REFLECTIVITY (XRR)

Characterize the physical surface properties of your thin films, multilayer coatings, and interfaces.

Determine the following information:

Layer thickness
Surface and interface roughness
Density
Chemical composition
Dislocation density

Amorphous, polycrystalline, and single-crystal layers can all be analyzed.

X-ray Reflectivity

ROCKING CURVES

High-resolution rocking curves can be used to analyze epitaxial layers and determine the crystalline perfection of bulk single crystals.

Determine the following information:

Layer composition and thickness
Mismatch, relaxation (lattice strain)
Layer tilt, curvature, and misorientation
Mosaicity
Dislocation density

Rocking Curves

RECIPROCAL SPACE MAPPING

This high-resolution technique provides the most information about epitaxial layers and is necessary to analyze strained films.

Determine the following information:

Separate Bragg peak displacement effects to enable accurate determination of strain, composition, lattice parameters, and layer thickness
Distinguish between strain and compositional changes
Distinguish between broadening due to mosaic spread or curvature

Reciprocal Space Mapping

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